Mea – Ceramic

♦Alumina(Al2O3)

O vaega sima sa'o na gaosia e le ZhongHui Intelligent Manufacturing Group(ZHHIMG) e mafai ona faia i mea fa'amea ma'a mama, 92 ~ 97% alumina, 99.5% alumina,> 99.9% alumina, ma le CIP malulu isostatic oomi.Sintering maualuga vevela ma machining saʻo, saʻo saʻo o le ± 0.001mm, lamolemole e oʻo atu i le Ra0.1, faʻaaoga le vevela e oʻo atu i le 1600 tikeri.O lanu eseese o keramika e mafai ona faia e tusa ai ma manaoga o tagata faatau, e pei o le: uliuli, paʻepaʻe, beige, lanu mumu, ma isi. O vaega saʻo sima gaosia e la matou kamupani e tetee atu i le vevela maualuga, corrosion, ofuina ma insulation, ma e mafai ona faaaogaina mo se taimi umi i le vevela maualuga, gaogao ma corrosive siosiomaga kesi.

Fa'aaoga lautele i le tele o masini gaosiga o le semiconductor: Fa'avaa (fa'ama'i sima), Substrate (fa'avae), Arm/ Bridge(manipulator), , Mechanical Components ma Ceramic Air Bearing.

AL2O3

Faʻaaogaina o keramika alumina mama maualuga:
1. Faʻaaogaina i masini semiconductor: ceramic vacuum chuck, tipi tipi, faʻamama tisiketi, ceramic CHUCK.
2. Fa'aliliuga vaega fa'afefete: vafer fe'avea'i chucks, wafer tipi tisiketi, wafer fa'amama tisiketi, masi ipu suction suction ipu.
3. LED / LCD mafolafola fale fa'aali alamanuia: pusi sima, tisiki olo sima, PIN SI'I, PIN nofoaafi.
4. Feso'ota'iga fa'apitoa, alamanuia la: fa'alava sima, la'au sima, laupapa va'ava'ai lau lomitusi sima sima.
5. Fa'asa'o vevela ma vaega fa'a'ese'ese eletise: pa'u sima.
I le taimi nei, e mafai ona vaevaeina ceramics alumini oxide i le mama maualuga ma ceramics masani.O le maualuga o le mama alumini oxide ceramics faasologa e faasino i mea sima o loʻo i ai le sili atu i le 99.9% Al₂O₃.Ona o lona vevela vevela e oʻo atu i le 1650 - 1990 ° C ma lona umi o le galu o le 1 ~ 6μm, e masani lava ona faʻaogaina i le tioata faʻafefiloi nai lo le faʻapipiʻiina o le platinum: lea e mafai ona faʻaaogaina e pei o le sodium tube ona o lona moli malamalama ma le pala uamea alkali.I totonu o le alamanuia faaeletonika, e mafai ona faʻaaogaina e avea ma mea faʻapipiʻi faʻasolosolo maualuga mo substrates IC.E tusa ai ma mataupu eseese o le alumini oxide, o le masani alumini oxide sima faasologa e mafai ona vaevaeina i 99 ceramics, 95 ceramics, 90 ceramics ma 85 ceramics.O nisi taimi, o sima ma 80% poʻo le 75% o le alumini oxide o loʻo faʻavasegaina foi o se faʻasologa masani o le alumini oxide.Faatasi ai ma i latou, 99 alumini oxide mea sima o loʻo faʻaaogaina e gaosia ai le vevela maualuga, faʻamau afi afi ma mea faʻapitoa faʻaofuofu, e pei o paʻu sima, faʻamaufaʻailoga sima ma ipu valve.95 alumini ceramics e masani ona faʻaaogaina e avea ma vaega e teteʻe ai i le ofuina.85 ceramics e masani ona fefiloi i nisi o meatotino, ma faʻaleleia atili ai le eletise ma le malosi faʻainisinia.E mafai ona faʻaogaina molybdenum, niobium, tantalum ma isi faʻamaufaʻailoga uʻamea, ma o nisi e faʻaaogaina e pei o masini eletise eletise.

 

Mea'ai Tulaga (Fa'atusa Tau) Igoa Oloa AES-12 AES-11 AES-11C AES-11F AES-22S AES-23 AL-31-03
Fa'aisi Vailaau Fa'alalo-Sodium Easy Sintering Oloa H₂O % 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Lol % 0.1 0.2 0.1 0.1 0.1 0.1 0.1
Fe₂0₃ % 0.01 0.01 0.01 0.01 0.01 0.01 0.01
SiO₂ % 0.03 0.03 0.03 0.03 0.02 0.04 0.04
Na₂O % 0.04 0.04 0.04 0.04 0.02 0.04 0.03
MgO* % - 0.11 0.05 0.05 - - -
Al₂0₃ % 99.9 99.9 99.9 99.9 99.9 99.9 99.9
Medium Particle Diameter (MT-3300, metotia su'esu'e leisa) μm 0.44 0.43 0.39 0.47 1.1 2.2 3
α Tele tioata μm 0.3 0.3 0.3 0.3 0.3 ~ 1.0 0.3 ~ 4 0.3 ~ 4
Fausia le Density** g/cm³ 2.22 2.22 2.2 2.17 2.35 2.57 2.56
Malosi o le Sintering** g/cm³ 3.88 3.93 3.94 3.93 3.88 3.77 3.22
Fa'aiti'itia le fua o le Laina Sintering** % 17 17 18 18 15 12 7

* MgO e le o aofia i le faʻatusatusaga o le mama o Al₂O₃.
* Leai se pa'u fua 29.4MPa (300kg/cm²), o le vevela o le sintering e 1600°C.
AES-11 / 11C / 11F: Faʻaopoopo 0.05 ~ 0.1% MgO, o le sinterability e sili ona lelei, o lea e faʻaoga i le alumini oxide ceramics ma le mama o le sili atu i le 99%.
AES-22S: Faʻaalia i le maualuga o le faʻapipiʻiina ma le maualalo o le faʻaitiitia o le laina sintering, e faʻatatau i le faʻafefeina o le faʻailoga ma isi oloa tetele e manaʻomia le saʻo saʻo.
AES-23 / AES-31-03: O loʻo i ai se maualuga maualuga, thixotropy ma laʻititi laʻititi nai lo le AES-22S.o le muamua o loʻo faʻaaogaina i ceramics aʻo faʻaaogaina le mea mulimuli e fai ma vai faʻaitiitia mo mea e faʻafefe ai afi, maua le lauiloa.

♦Silicon Carbide (SiC) Uiga

Uiga Lautele Mama o vaega autu (wt%) 97
Lanu Lanu uliuli
Malosi (g/cm³) 3.1
Suavai mitiia (%) 0
Uiga Fa'ainisinia Malosi fa'afoliga (MPa) 400
Young modulus (GPa) 400
Vickers ma'a'a (GPa) 20
Uiga vevela Malaga maualuga o le vevela (°C) 1600
Coefficient fa'alauteleina vevela RT~500°C 3.9
(1/°C x 10-6) RT~800°C 4.3
Fa'avevela vevela (W/m x K) 130 110
Tete'e te'i vevela ΔT (°C) 300
Uiga faaeletise Tete'e o le voluma 25°C 3 x 106
300°C -
500°C -
800°C -
Dielectric tumau 10GHz -
Ga'i eletise (x 10-4) -
Q Factor (x 104) -
Volivili malepelepe fa'a eletise (KV/mm) -

20200507170353_55726

♦Silicon Nitride Ceramic

Mea Vaega Si₃N₄
Metotia Sintering - Fa'amama kasa Sintered
Malosi g/cm³ 3.22
Lanu - Efuefu Pogisa
Fuafua ole Suavai % 0
Young Modulus Gpa 290
Vickers Malosi Gpa 18 - 20
Malosi Compressive Mpa 2200
Malosi punou Mpa 650
Amioga vevela W/mK 25
Tete'e Te'i vevela Δ (°C) 450 - 650
Mata'utia Fa'agaioiga Vevela °C 1200
Volume Resistivity Ω·cm > 10 ^ 14
Dielectric tumau - 8.2
Malosiaga Dielectric kV/mm 16